Note: Nanomechanical characterization of soft materials using a micro-machined nanoforce transducer with an FIB-made pyramidal tip.
作者： Nicole Wollschläger , U. Brand , K. Hiller , S. Gao , Z. Li
DOI: 10.1063/1.4977474
关键词:
摘要: The quantitative nanomechanical characterization of soft materials using the nanoindentation tech-nique requires further improvements in performances instruments, including their force resolution particular. A micro-machined silicon nanoforce transducer based upon electrostatic comb drives featuring and depth resolutions down to ∼1 nN 0.2 nm, respectively, is described. At end MEMS transducer's main shaft, a pyramidal tip fabricated focused ion beam facility. proof-of-principle setup with this nanoindenter has been established measure mechanical properties polydimethylsiloxane. First measurement results demonstrate that prototype system able quantitatively characterize elastic moduli few MPa.
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