Method of making an encapsulated plasma sensitive device
作者： Charles C. Bonham , Mac R. Zumhoff , Gordon L. Graff , Kenneth Jeffrey Nelson , Mark E. Gross
DOI:
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摘要: A method of making an encapsulated plasma sensitive device. The comprises: providing a device adjacent to substrate; depositing protective layer on the using process selected from non-plasma based processes, or modified sputtering processes; and at least one barrier stack layer, comprising decoupling being between substrate stack, wherein both are deposited process, having reduced amount damage caused by compared made without layer. An is also described.
google.de 参考文章(295)
John D. Affinito, Plasma enhanced chemical deposition of conjugated polymer ,(2001)
Ewald Guenther, Lim Shuang Fang, Mark Auch, Chua Soo Jin, Encapsulation of electronic devices ,(2002)
Donald Max Simons, William Adrian Frey, Polyether polyamines as linking agents for particle reagents useful in immunoassays ,(1984)
Norman L. Turner, John Macneill White, Vacuum processing apparatus having improved throughput ,(1993)
Robert J. Fleming, Joseph M. Mcgrath, Christopher S. Lyons, Retroreflective articles having polymer multilayer reflective coatings ,(1999)
John D. Affinito, Plasma enhanced chemical deposition for high and/or low index of refraction polymers ,(2001)
Kevin Warner Flanagan, Marc Schaepkens, Diffusion barrier coatings having graded compositions and devices incorporating the same ,(2005)
Mark E. Gross, John D. Affinito, John G. Darab, Flash evaporation of liquid monomer particle mixture ,(1998)
David A. Engler, Raghunath Padiyath, Jon E. Ottman, Fred B. McCormick, Donald J. McClure, Brian J. Gates, Method of making an organic light emitting device ,(2008)
John David Rr Box F Affinito, Vacuum deposition and curing of liquid monomers ,(1993)