Method and apparatus for manufacturing superconducting components via laser ablation followed by laser material processing

摘要: The method for manufacturing superconducting elements according to the present invention include following steps of: (a) placing a substrate near target in chamber so that is positioned face surface of target, wherein comprises material complex oxide compounds; (b) irradiating laser beam vaporize or sublime deposited onto substrate, maintains position facing target; and (c) fabricating layer on form element by without removing from chamber. step used irradiate may traverse along first optical path, second which not consistent with path.