Characterization of Hard Diamond-Like Carbon Films Formed by Ar Gas Cluster Ion Beam-Assisted Fullerene Deposition

摘要: The coordination of carbon atoms in diamond-like (DLC) thin films formed by Ar gas cluster ion beam (GCIB) assisted deposition using fullerene as the source was investigated measuring near-edge X-ray absorption fine structure (NEXAFS) spectra K-edge over excitation energy range 275–320 eV, synchrotron radiation. With attention to peak corresponding transition electron from a 1s orbital π* orbital, relative sp2 contents various DLC were estimated. GCIB-assisted observed be lower than those other methods. hardness value measured with nano-indentation technique found strongly related content film.