作者: Abdulrahman Alofi , Hassen M Ouakad , Mohammad Tausiff , None
DOI: 10.3390/ACT5030022
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摘要: In this paper, the structural behavior of a micro-electromechanical system (MEMS) composed two electrically coupled parallel clamped-clamped microbeams is investigated. An Euler Bernoulli beam model considered along with nonlinear electric actuating force to get equation motion governing actuator. A reduced-order modeling (ROM) based on Galerkin expansion technique, while assuming linear undamped mode shapes straight fixed-fixed as basis functions, assumed discretization technique equations in investigation. The results showed that double-microbeam MEMS actuator configuration requires lower actuation voltage and switching time compared single microbeam Then, effects both air gap depths were Finally, eigenvalue problem was investigated variation fundamental natural frequencies applied DC load.