Structural Behavior of a Multi-Layer Based Microbeam Actuator

作者: Abdulrahman Alofi , Hassen M Ouakad , Mohammad Tausiff , None

DOI: 10.3390/ACT5030022

关键词:

摘要: In this paper, the structural behavior of a micro-electromechanical system (MEMS) composed two electrically coupled parallel clamped-clamped microbeams is investigated. An Euler Bernoulli beam model considered along with nonlinear electric actuating force to get equation motion governing actuator. A reduced-order modeling (ROM) based on Galerkin expansion technique, while assuming linear undamped mode shapes straight fixed-fixed as basis functions, assumed discretization technique equations in investigation. The results showed that double-microbeam MEMS actuator configuration requires lower actuation voltage and switching time compared single microbeam Then, effects both air gap depths were Finally, eigenvalue problem was investigated variation fundamental natural frequencies applied DC load.

参考文章(29)
Sébastien Baguet, Laurent Duraffourg, Régis Dufour, Sébastien Hentz, Najib Kacem, Georges Jourdan, Overcoming limitations of nanomechanical resonators with simultaneous resonances Applied Physics Letters. ,vol. 107, pp. 073105- ,(2015) , 10.1063/1.4928711
Viviana Mulloni, Francesco Solazzi, Giuseppe Resta, Flavio Giacomozzi, Benno Margesin, RF-MEMS switch design optimization for long-term reliability symposium on design, test, integration and packaging of mems/moems. ,vol. 78, pp. 323- 332 ,(2013) , 10.1007/S10470-013-0220-X
F Najar, S Choura, E M Abdel-Rahman, S El-Borgi, A Nayfeh, Dynamic analysis of variable-geometry electrostatic microactuators Journal of Micromechanics and Microengineering. ,vol. 16, pp. 2449- 2457 ,(2006) , 10.1088/0960-1317/16/11/028
M. Shamshirsaz, M. B. Asgari, Polysilicon micro beams buckling with temperature-dependent properties symposium on design, test, integration and packaging of mems/moems. ,vol. 14, pp. 957- 961 ,(2008) , 10.1007/S00542-008-0589-0
Hassen M Ouakad, Mohammad I Younis, None, The dynamic behavior of MEMS arch resonators actuated electrically International Journal of Non-linear Mechanics. ,vol. 45, pp. 704- 713 ,(2010) , 10.1016/J.IJNONLINMEC.2010.04.005
Saeid Afrang, Ebrahim Abbaspour-Sani, A LOW VOLTAGE MEMS STRUCTURE FOR RF CAPACITIVE SWITCHES Progress in Electromagnetics Research-pier. ,vol. 65, pp. 157- 167 ,(2006) , 10.2528/PIER06093001
Jason P. Chaffey, Mike Austin, Analytical modeling of the electromechanical coupling of cantilever beams SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems. ,vol. 4935, pp. 86- 93 ,(2002) , 10.1117/12.469085
J.David Zook, David W. Burns, William R. Herb, Henry Guckel, Joon-Won Kang, Yongchul Ahn, Optically excited self-resonant microbeams Sensors and Actuators A: Physical. ,vol. 52, pp. 92- 98 ,(1996) , 10.1016/0924-4247(96)80131-2
Eihab M Abdel-Rahman, Mohammad I Younis, Ali H Nayfeh, None, Characterization of the mechanical behavior of an electrically actuated microbeam Journal of Micromechanics and Microengineering. ,vol. 12, pp. 759- 766 ,(2002) , 10.1088/0960-1317/12/6/306