Optical Properties of TiO2 Films Deposited by Reactive Electron Beam Sputtering
作者： V. N. Kruchinin , T. V. Perevalov , V. V. Atuchin , V. A. Gritsenko , A. I. Komonov
DOI: 10.1007/S11664-017-5552-3
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摘要: Titanium dioxide (anatase, a-TiO2) films have been prepared by electron beam sputtering of a TiO2 target in reactive atmosphere and their structural, microstructural, optical properties were evaluated reflection high- energy diffraction (RHEED) x-ray (XRD) analyses, atomic force microscopy (AFM), spectroscopic ellipsometry (SE). Different models for determination film parameters tested compared. The dispersive defined using the Tauc–Lorentz model SE photon range E = 1.12–4.96 eV. transparent at 3 bandgap was estimated level Eg ≈ 3.44
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