Characterization of tungsten-carbon layers deposited on stainless steel by reactive magnetron sputtering

摘要: Tungsten-carbon coatings have been deposited on stainless steel substrates by reactive magnetron sputtering from Ar–CH4 mixtures. The carbon concentration in the measured electron microprobe analyses was found to be proportional CH4 flow rate. Only cubic α–W phase with a dilated lattice parameter identified W–C having content lower than 25 at. %. Since of these increased increasing content, may assumed solid solutions. nonstoichiometric β–WC1−x carbide (cubic phase) detected containing 30 70 % carbon. chemical state elements investigated x-ray photoelectron spectroscopy. Vickers hardness considerably dependent concentration. A maximum microhardness 26 000 MPa for either 14–15 or 40–45 correlation between crystallographic structure and is analyzed discussed this paper.