Dynamics and response of a humidity sensor based on a Love wave device incorporating a polymeric layer
作者： Jiansheng Liu , Lijun Wang
DOI: 10.1016/J.SNB.2014.07.095
关键词:
摘要: Abstract In this study, we investigate the dynamics and response of a humidity sensor based on polymer-coated Love wave device. A review is presented for theoretical model waves in layered structure with viscoelastic layer piezoelectric substrate. Numerical illustrations are executed mass velocity sensitivity loss The BET equation its improved introduced to describe adsorption mechanism gas detector surface. method calculating surface area polymer layer, which proved porous material. An experiment performed device consisting two 28 μm-periodic interdigital transducers, 0.47 μm-thick PVA an ST-90°X quartz operation frequency insertion measured by using network analyzer; relative calculated through comparing fitted shift caused monolayer water molecules. shifts increments shown as functions respect humidity; curves agree well experimental results.
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