Diamond Film Preparation by Arc Discharge Plasma Jet Chemical Vapor Deposition in the Methane Atmosphere

摘要: Diamond films are synthesized by arc discharge plasma jet chemical vapor deposition in the methane atmosphere. The apparatus developed generates a stabilized continuously for more than 12h. consists of hydrogen and argon. is used as an atmospheric gas mixed into jet. sprayed onto cool‐down substrate, diamond film deposited on substrate surface. By means this method, molybdenum at growth rate 930 μm/h. crystallinity measures well x‐ray diffraction Raman spectroscopy. weight obtained method unit time seems to be almost same that high‐temperature high‐pressure synthesis method.