作者: S. Van Aert , S. Bals , L. Y. Chang , A. J. den Dekker , A. I. Kirkland
DOI: 10.1007/978-3-540-85156-1_49
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摘要: In principle, electron microscopy can provide accurate and precise numbers for the unknown structure parameters of materials under study. As an example, atomic column positions be determined with accuracy precision that is orders magnitude better than resolution microscope. This requires, however, a quantitative, model-based method. our opinion, maximum likelihood (ML) method most appropriate one since it has optimal statistical properties. contribution aims to explain basic principles limitations Moreover its practical applicability usefulness will demonstrated using recent experimental examples.