作者: Wesley Erck
DOI: 10.1117/12.824271
关键词:
摘要: Mask order automation has increased steadily over the years through a variety of individual mask customer implementations. These have been supported by customer-specific software at mask suppliers to support customer output formats. Some customers use SEMI P10 1 standard, some supplier-specific formats, and Some customers little depend instead on close customer-supplier relationships. Implementations are varied in quality effectiveness. A major factor which prolonged adoption more advanced effective solutions a lack understanding economic benefits. think standardized mainly benefits mask supplier entry automation, but this ignores number other significant benefits differ dramatically for each party supply chain. This paper discusses nature of those differing advantages presents simple models suited four business cases: integrated device manufacturers (IDM), fabless companies, foundries suppliers. Examples estimates the financial these types will be shown.