High quality factor trapezoidal subwavelength grating waveguide micro-ring resonator

摘要: In recent decades, silicon photonics has attracted intensive research interest in optical communications due to its advantageous compact dimensions and high-volume manufacturability. Particularly, micro-ring resonators on silicon-oninsulator (SOI) platform have been widely exploited as a basic building block for vast range of applications such switches, modulators, sensors. A majority these involve light-matter interaction, which can be substantially enhanced by the high quality factor resonators. However, conventional strip waveguide based suffer from intrinsic dilemma achieving light confinement strong interaction simultaneously. Subwavelength grating (SWG) waveguides, comprised periodically interleaved low refractive index materials with pitch less than one wavelength, demonstrated promising alternative. For SWG waveguides built SOI wafers, ratio cladding engineered microscopically achieve desired macroscopic properties. The control properties could potentially lead significant performance improvements compared photonic devices, filters (SWGMRs) that so far only provide moderate (~5600) large radius (e.g. 15 μm), greatly jeopardize wide spread efforts this area. paper, we propose use trapezoidal pillars reduce bend loss SWGMRs improve factor. first time, experimentally demonstrate smallest SWGMR (the equals 5 μm) an applicable 11,500. This approach also applied larger radii higher factors. We 10 μm up 45,000. Compared rectangular pillars, factors is increased 4.6 times 3 radius, respectively.