Humidity sensing behavior of silicon nanowires with hexamethyldisilazane modification
作者： Xuejiao Chen , Jian Zhang , Zhiliang Wang , Qiang Yan , Shichao Hui
DOI: 10.1016/J.SNB.2011.02.009
关键词:
摘要: Abstract In this paper, the sensing behavior of capacitive humidity sensors based on silicon nanowires with and without hexamethyldisilazane (HMDS) modification has been investigated. The mechanism is capacitance variations due to adsorption/desorption water molecules among nanowires. effect HMDS sensor's performance was discussed. study indicated that after treatment, surface turns into hydrophobic such as linearity, hysteresis response time can be improved remarkably.
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