Microwave MEMS-based voltage-controlled oscillators
作者： K. Suyama , A. Dec
DOI: 10.1109/22.883875
关键词:
摘要: A microwave voltage-controlled oscillator (VCO) based on coupled bonding wire inductors and microelectromechanical system (MEMS)-based variable capacitors for frequency tuning is demonstrated in this paper. The MEMS-based were fabricated a standard polysilicon surface micromachining technology. have nominal capacitance of 1.4 pF Q factor 23 at 1 GHz 14 2 GHz. from to 1.9 as the voltage swept 0 5 V. VCO, 0.5 /spl mu/m CMOS technology, was assembled ceramic package where MEMS dice bonded together. operates 2.4 GHz, achieves phase noise -122 dBc/Hz MHz offset carrier, exhibits range 3.4%.
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