Method for growth of crystal surfaces and growth of heteroepitaxial single crystal films thereon
作者： Lawrence G. Matus , J. Anthony Powell , David J. Larkin , Philip G. Neudeck
DOI:
关键词:
摘要: A method of growing atomically-flat surfaces and high-quality low-defect crystal films polytypic compounds heteroepitaxially on compound substrates that are different than the film. The is particularly suited for growth 3C-SiC, 2H-AlN, 2H-GaN 6H-SiC.
jaxa.jp参考文章(11)
Aditya Kumar Gupta, Fazal Ali, HEMTs and HBTs: Devices, Fabrication, and Circuits ,(1991)
Ralph E. Williams, Gallium Arsenide Processing Techniques ,(1984)
Gerald B. Stringfellow, Organometallic Vapor-Phase Epitaxy: Theory and Practice ,(1989)
J. Anthony Powell, Process for the homoepitaxial growth of single-crystal silicon carbide films on silicon carbide wafers National Aeronautics and Space Administration Report. ,(1991)
J Anthony Powell, David J Larkin, Process for the controlled growth of single-crystal films of silicon carbide polytypes on silicon carbide wafers National Aeronautics and Space Administration Report. ,(1992)
Lawrence G. Matus, J. Anthony Powell, David J. Larkin, Philip G. Neudeck, Compound semi-conductors and controlled doping thereof. ,(1994)
Tsunenobu Kimoto, Hiroyuki Matsunami, Nucleation and step motion in chemical vapor deposition of SiC on 6H‐SiC{0001} faces Journal of Applied Physics. ,vol. 76, pp. 7322- 7327 ,(1994) , 10.1063/1.358021
U. Morlock, M. Kelsch, E. Bauser, Extremely flat layer surfaces in liquid phase epitaxy of GaAs and AlxGa1−xAs Journal of Crystal Growth. ,vol. 87, pp. 343- 349 ,(1988) , 10.1016/0022-0248(88)90186-8
H. Morkoç, S. Strite, G. B. Gao, M. E. Lin, B. Sverdlov, M. Burns, Large‐band‐gap SiC, III‐V nitride, and II‐VI ZnSe‐based semiconductor device technologies Journal of Applied Physics. ,vol. 76, pp. 1363- 1398 ,(1994) , 10.1063/1.358463
Holger Jürgensen, CVD engineering for multilayer multicomponent materials: optoelectronics☆ Materials Chemistry and Physics. ,vol. 41, pp. 79- 86 ,(1995) , 10.1016/0254-0584(95)01528-0