摘要: Sputtering of atoms from a solid surface as consequence the impact energetic particles was first observed more than century ago (Grove, 1853). However, most present experimental knowledge and theoretical understanding sputtering phenomenon has been gained during past 30 years. Extensive, recent reviews many aspects can be found in volumes edited by Varga et al. (1980), Cobic Behrisch (1981, 1982). That composition an alloy near affected shown experimentally twenty years Gillam (1959). An increasing interest multicomponent materials developed decade, much work this area reviewed recently Andersen (1981).
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