Plant for forming electronic circuits on substrates

摘要: Embodiments of the present invention generally provide a cluster tool 10 that can be used to form electronic circuits on substrate in an automated fashion. In one embodiment, is adapted process portions part photovoltaic cell or green-tape type circuit device fashion using system controller 101. having plurality work stations comprise at least station deposit layer substrate, drying oven dry substrates, testing test and storage store transport element positionable each stations. A guide defines substantially closed along which elements are able moved, substrates disposed.