GLAD Magnetron Sputtered Ultra-Thin Copper Oxide Films for Gas-Sensing Application
作者： Artur Rydosz , Katarzyna Dyndał , Wojciech Andrysiewicz , Dominik Grochala , Konstanty Marszałek
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摘要: … In this paper, the investigation results on copper oxide ultra-thin films deposited by … ultra-thin films deposited at 80%O 2 /20%Ar by using the GLAD deposition technique with a substrate …
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