Sensing mechanism of low temperature NO2 sensing with top–bottom electrode (TBE) geometry

摘要: Abstract In this work top–bottom electrode geometry (TBE) was designed and applied to characterize NO 2 sensing behavior of undoped chromium (Cr) doped titanium dioxide layers. For comparison purposes, the same layers were also coated on classical interdigitated electrodes (IDEs). The resulting sensors based TBE configuration showed improved properties toward wide range concentration in contrast fabricated IDEs having layer. substitution trivalent Cr 3+ within Ti 4+ lattice modified electronic structure TiO p-type semiconductor sensor response . At 200 °C TBE-TiO :Cr highest negligible drift noise, for instance 212 50 ppm 545 100 ppm Intensive impedance spectroscopic study performed predict mechanism with configuration. equivalent circuit modeling facilitates possibility identify contribution anticipating from Pt/sensing layer interface, gas reaction at surface microstructure.