UV-assisted room-temperature chemiresistive NO2 sensor based on TiO2 thin film

作者: Ting Xie , Nichole Sullivan , Kristen Steffens , Baomei Wen , Guannan Liu

DOI: 10.1016/J.JALLCOM.2015.09.021

关键词: Crystal structureElectrical resistivity and conductivityX-ray photoelectron spectroscopyAnalytical chemistryAbsorption spectroscopyUltravioletMaterials scienceChemical stateThin filmDiffraction

摘要: TiO 2 thin film based, chemiresistive sensors for NO 2 gas which operate at room temperature under ultraviolet (UV) illumination have been demonstrated in this work. The rf-sputter deposited and post-annealed TiO 2 thin films have been characterized by atomic force microscopy, X-ray photoelectron spectroscopy, and X-ray diffraction to obtain surface morphology, chemical state, and crystal structure, respectively. UV–vis absorption spectroscopy and Tauc plots show the optical properties of the TiO 2 films. Under UV …

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