作者: Ting Xie , Nichole Sullivan , Kristen Steffens , Baomei Wen , Guannan Liu
DOI: 10.1016/J.JALLCOM.2015.09.021
关键词: Crystal structure 、 Electrical resistivity and conductivity 、 X-ray photoelectron spectroscopy 、 Analytical chemistry 、 Absorption spectroscopy 、 Ultraviolet 、 Materials science 、 Chemical state 、 Thin film 、 Diffraction
摘要: TiO 2 thin film based, chemiresistive sensors for NO 2 gas which operate at room temperature under ultraviolet (UV) illumination have been demonstrated in this work. The rf-sputter deposited and post-annealed TiO 2 thin films have been characterized by atomic force microscopy, X-ray photoelectron spectroscopy, and X-ray diffraction to obtain surface morphology, chemical state, and crystal structure, respectively. UV–vis absorption spectroscopy and Tauc plots show the optical properties of the TiO 2 films. Under UV …