The effects of surface conditions of TiO2 thin film on the UV assisted sensing response at room temperature

摘要: ABSTRACT Thin film oxides have attracted attention in implementations of gas sensors, notably NO 2 , owing to their unique physical, optical, and chemical properties. While the properties are presumed be strongly dependent on surface conditions thin films, it is not yet clear how sensor affect its analyte sensing response. Here, we report influence carbon contamination roughness TiO sensors. The films were prepared by rf-sputtering. intentionally contaminated damaged with organic polymers (photolithography resist) microwave plasma, respectively. chemistry was assessed high resolution X-ray photoelectron spectroscopy, atomic force microscopy exploited obtain morphology fabricated work aims improve long-term efficacy sensors studying reasons for degradation performance. Our results indicate that residue based prolong response time roughly threefold fivefold, recovery rate deteriorated poor as well.