Polymer, method for producing the same, composition for forming insulation film, method for producing insulation film and silica-based insulation film
作者： Masahiro Akiyama , 恭志 中川 , Yasushi Nakagawa , 将宏 秋山
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摘要: PROBLEM TO BE SOLVED: To provide a new polymer having methylsilyl group bonded to Si atom constituting the polymer, method for producing composition forming an insulation film, and silica-based film. SOLUTION: The invention provides produced by condensing silane compound expressed general formula (1) (X 1 X 3 are each independently halogen atom, alkoxy group, acyloxy or hydroxy group; Y alkyl alkenyl aryl group). COPYRIGHT: (C)2008,JPO&INPIT
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