Probe card for probing wafers with raised contact elements
作者： Gaetan L. Mathieu , Gary W. Grube , Benjamin N. Eldridge
DOI:
关键词:
摘要: A probe card is provided for contacting an electronic component with raised contact elements. In particular, the present invention useful a semiconductor wafer resilient elements, such as springs. designed to have terminals mate elements on wafer. preferred embodiment, are posts. embodiment include material suitable repeated contacts. one particularly space transformer prepared posts side and opposing side. An interposer spring contacts connects of corresponding terminal card, which in turn connected connectable test device conventional tester.
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