Turbulent shear force microsensor

摘要: A microbridge is used for the accurate measuring of time varying shear forces in presence fluctuating pressure. microdimensioned plate suspended by arms to form a microbridge. The microdimensions enable smallest turbulence scales interest be sensed uniformally throughout entire surface plate. cavity beneath so small that viscous drag created air within and dampens normal movement conjunction with damping effect sensor substantially insensitive pressure thus sense lateral independent forces. fabricated micromachining. sacrificial layer deposited over substrate. structural patterned support layer. formed selective etchant removing leaving rest structure above In differential capacitance readout scheme, conducting capacitively coupled conductors change capacitive coupling generates an indication deflection thereby stress vertical movement. Optic schemes may also employed are readily incorporated fabrication process. mounting member presses into holding which fits matching slot flush target wall.