ORGANIC THIN FILMS FORMATION BY LASER ABLATION
作者： KENJIN HIGAKI , CHIAKI NAGAI , OSAMU MURATA , HAYAMI ITOH
DOI: 10.2494/PHOTOPOLYMER.6.429
关键词:
摘要: We have developed a new organic thin film fabrication process, which makes use of laser ablation followed by photochemical reaction using excimer laser. In this study, we investigated the conditions for good films formation such as fluence, substrate temperature, stoichiometrically equivalent mixture terephthaloylchloride and p-phenylenediamine source. It was shown that polymer were formed under where fluence 20-310mJ/cm 2 temperature 200-300°C through FT-IR characterization.
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