作者: Yong Zhang , Xinyu Liu , Changhai Ru , Yan Liang Zhang , Lixin Dong
DOI: 10.1109/JMEMS.2011.2153825
关键词:
摘要: … were used as active transducer elements in a pressure sensor [1] and a displacement … owing to e-beam irradiation. We experimentally verified the e-beam irradiation effect, which will be …