Piezoresistivity Characterization of Synthetic Silicon Nanowires Using a MEMS Device

作者: Yong Zhang , Xinyu Liu , Changhai Ru , Yan Liang Zhang , Lixin Dong

DOI: 10.1109/JMEMS.2011.2153825

关键词:

摘要: … were used as active transducer elements in a pressure sensor [1] and a displacement … owing to e-beam irradiation. We experimentally verified the e-beam irradiation effect, which will be …

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