Laser-assisted atom probe tomography of 18O-enriched oxide thin film for quantitative analysis of oxygen
作者： T. Kinno , M. Tomita , T. Ohkubo , S. Takeno , K. Hono
DOI: 10.1016/J.APSUSC.2013.11.039
关键词:
摘要: Abstract 18O-enriched SiO2 thin film with the 16O:18O ratio of around 1:1 has been analyzed by laser-assisted atom probe tomography (LA-APT) using 343 nm-wavelength ultraviolet laser or 532 nm-wavelength green in order to investigate quantitativeness oxygen concentration determined LA-APT. No clear evidence for detecting 16O18O++ signals was found mass spectra, implying that peaks at mass/charge 16 and 18 are dominated O+, not O2++. The calculated elemental composition indicated significant loss LA-APT analysis SiO2.
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