Formation of Si‐nc by Reactive Magnetron Sputtering

作者: Fabrice Gourbilleau , Celine Ternon , Christian Dufour , Xavier Portier , Richard Rizk

DOI: 10.1002/9783527629954.CH11

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参考文章(59)
Yoshihiko Kanemitsu, Naoya Shimizu, Takuya Komoda, Peter L. F. Hemment, Brian J. Sealy, Photoluminescent spectrum and dynamics of Si+-ion-implanted and thermally annealed SiO2 glasses. Physical Review B. ,vol. 54, pp. 14329- 14332 ,(1996) , 10.1103/PHYSREVB.54.R14329
Vincenzo Vinciguerra, Giorgia Franzò, Francesco Priolo, Fabio Iacona, Corrado Spinella, Quantum confinement and recombination dynamics in silicon nanocrystals embedded in Si/SiO2 superlattices Journal of Applied Physics. ,vol. 87, pp. 8165- 8173 ,(2000) , 10.1063/1.373513
Shuji Munekuni, Toshihisa Yamanaka, Yasushi Shimogaichi, Ryoichi Tohmon, Yoshimichi Ohki, Kaya Nagasawa, Yoshimasa Hama, Various types of nonbridging oxygen hole center in high-purity silica glass Journal of Applied Physics. ,vol. 68, pp. 1212- 1217 ,(1990) , 10.1063/1.346719
L. Tsybeskov, K. D. Hirschman, S. P. Duttagupta, M. Zacharias, P. M. Fauchet, J. P. McCaffrey, D. J. Lockwood, Nanocrystalline-silicon superlattice produced by controlled recrystallization Applied Physics Letters. ,vol. 72, pp. 43- 45 ,(1998) , 10.1063/1.120640
F Huisken, H Hofmeister, B Kohn, M.A Laguna, V Paillard, Laser production and deposition of light-emitting silicon nanoparticles Applied Surface Science. ,vol. 154, pp. 305- 313 ,(2000) , 10.1016/S0169-4332(99)00476-6
Jan Linnros, Nenad Lalic, Augustinas Galeckas, Vytautas Grivickas, Analysis of the stretched exponential photoluminescence decay from nanometer-sized silicon crystals in SiO2 Journal of Applied Physics. ,vol. 86, pp. 6128- 6134 ,(1999) , 10.1063/1.371663
DJ Lockwood, ZH Lu, J-M Baribeau, None, Quantum Confined Luminescence inSi/SiO2Superlattices Physical Review Letters. ,vol. 76, pp. 539- 541 ,(1996) , 10.1103/PHYSREVLETT.76.539
S. Charvet, R. Madelon, F. Gourbilleau, R. Rizk, Spectroscopic ellipsometry analyses of sputtered Si/SiO2 nanostructures Journal of Applied Physics. ,vol. 85, pp. 4032- 4039 ,(1999) , 10.1063/1.370307
H. Rinnert, M. Vergnat, A. Burneau, Evidence of light-emitting amorphous silicon clusters confined in a silicon oxide matrix Journal of Applied Physics. ,vol. 89, pp. 237- 243 ,(2001) , 10.1063/1.1330557
E. Trave, V. Bello, G. Mattei, M. Mattiazzi, E. Borsella, M. Carpanese, F. Fabbri, M. Falconieri, R. D’Amato, N. Herlin-Boime, Surface control of optical properties in silicon nanocrystals produced by laser pyrolysis Applied Surface Science. ,vol. 252, pp. 4467- 4471 ,(2006) , 10.1016/J.APSUSC.2005.07.124