Spectroscopic ellipsometry analyses of sputtered Si/SiO2 nanostructures
作者： S. Charvet , R. Madelon , F. Gourbilleau , R. Rizk
DOI: 10.1063/1.370307
关键词:
摘要: … Let us specify first that, whatever the Td value is, no PL is emitted from the as-… PL spectra of the 1100 C annealed samples originally deposited at 500 C and the indicated sputtered …
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