作者: C. Wang , Q. L. Wei , W. Huang , Q. Luo , J. G. He
DOI: 10.1117/12.2020152
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摘要: The CeO 2 nanoparticles with modified surface and mean sizes distribution during 107.0 nm - 127.7 are used as abrasive in magnetorheological finishing (MRF) fluid. slow rotation dispersion without shearing thinning is better than fast emulsification dispersion. Steady D-shaped spots high quality precise processing with PV=0.1λ, GRMS=0.002λ/cm, Rq=0.83 obtained on a 435 mm x BK7 glass under self-developed MRF apparatus.