Effect of anisotropy on microellipsometry in the system
作者： A. Michaelis , J.W. Schultze
DOI: 10.1016/0040-6090(93)90067-Y
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摘要: Abstract Electrochemical in situ ellipsometry with a focused laser beam (microellipsometry) is used to determine properties of oxide layers on single grains Ti. The data for δ and Ψ differ from grain also strong dependence the sample rotation around surface normal occurs. This due anisotropy Ti TiO 2 system. measurements deliver information about epitaxy layer formation orientation substratum's optical axis, which proved by well-oriented crystals. A method interpretation presented possibly allows determination growth rates despite their anisotropy. Measurements microreflection spectroscopy photocurrent laser-scanning confirm microellipsometric results.
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sci-hub.se 参考文章(14)
J. L. Ord, D. J. De Smet, Anodic Oxidation of Tungsten in Non‐Aqueous Electrolyte I . Optical Anisotropy of the Oxide Film Journal of The Electrochemical Society. ,vol. 139, pp. 359- 363 ,(1992) , 10.1149/1.2069221
Dwight W. Berreman, Optics in Stratified and Anisotropic Media: 4×4-Matrix Formulation Journal of the Optical Society of America. ,vol. 62, pp. 502- 510 ,(1972) , 10.1364/JOSA.62.000502
D.J. De Smet, Generalized ellipsometry and the 4 × 4 matrix formalism Surface Science. ,vol. 56, pp. 293- 306 ,(1976) , 10.1016/0039-6028(76)90454-4
Lj.D. Arsov, Dissolution electrochimique des films anodiques du titane dans l'acide sulfurique Electrochimica Acta. ,vol. 30, pp. 1645- 1657 ,(1985) , 10.1016/0013-4686(85)87011-0
David G. Wiesler, Michael F. Toney, Mahesh G. Samant, Owen R. Melroy, Chris S. McMillan, William H. Smyrl, Structure and epitaxy of anodic TiO2/Ti(1120) Surface Science. ,vol. 268, pp. 57- 72 ,(1992) , 10.1016/0039-6028(92)90950-B
Ralph F. Cohn, James W. Wagner, Jerome Kruger, Dynamic imaging microellipsometry: theory, system design, and feasibility demonstration. Applied Optics. ,vol. 27, pp. 4664- 4671 ,(1988) , 10.1364/AO.27.004664
R. M. A. Azzam, Stanley S. Ballard, N. M. Bashara, Ellipsometry and polarized light ,(1977)
M. Erman, J. B. Theeten, Spatially resolved ellipsometry Journal of Applied Physics. ,vol. 60, pp. 859- 873 ,(1986) , 10.1063/1.337327
K. Leitner, J. W. Schultze, Microprobe Photocurrent Investigations and Laser Induced Radiation Effects on TiO2-Films Berichte der Bunsengesellschaft für physikalische Chemie. ,vol. 92, pp. 181- 187 ,(1988) , 10.1002/BBPC.198800040
J.W. Schultze, J. Thietke, Local photocurrent and high power density investigations of oxide films on valve metals with a focused laser beam Electrochimica Acta. ,vol. 34, pp. 1769- 1774 ,(1989) , 10.1016/0013-4686(89)85063-7