Ion and Vacuum Ultraviolet Photon Beam Effects in 193 nm Photoresist Surface Roughening: The Role of the Adamantyl Pendant Group
作者： Ting-Ying Chung , David B. Graves , Florian Weilnboeck , Robert L. Bruce , Gottlieb S. Oehrlein
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sci-hub.se 参考文章(72)
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