Changes in chemical bonding of diamond-like carbon films by atomic-hydrogen exposure
作者： H. Nakazawa , R. Osozawa , Y. Enta , M. Suemitsu
DOI: 10.1016/J.DIAMOND.2010.08.001
关键词:
摘要: Abstract We have deposited unhydrogenated diamond-like carbon (DLC) films on Si substrate by pulsed laser deposition using KrF excimer laser, and investigated the effects of atomic-hydrogen exposure structure chemical bonding DLC photoelectron spectroscopy (PES) synchrotron radiation Raman spectroscopy. The fraction sp 3 bonds at film surface, as evaluated from C1s spectra, increased a temperature 400 °C exposure, whereas decreased 700 °C with increasing time. It was found that higher surfaces than subsurfaces exposed to atomic hydrogen both temperatures. spectrum showed clustering 2 atoms progressed inside near surface even such low 400 °C.
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S. C. Ray, C. W. Bao, H. M. Tsai, J. W. Chiou, J. C. Jan, K. P. Krishna Kumar, W. F. Pong, M.-H. Tsai, W.-J. Wang, C.-J. Hsu, T. I. T. Okpalugo, P. Papakonstantinou, J. A. McLaughlin, Electronic structure and bonding properties of Si-doped hydrogenated amorphous carbon films Applied Physics Letters. ,vol. 85, pp. 4022- 4024 ,(2004) , 10.1063/1.1812594
M. Tabbal, P. Mérel, M. Chaker, M. A. El Khakani, E. G. Herbert, B. N. Lucas, M. E. O’Hern, Effect of laser intensity on the microstructural and mechanical properties of pulsed laser deposited diamond-like-carbon thin films Journal of Applied Physics. ,vol. 85, pp. 3860- 3865 ,(1999) , 10.1063/1.369757
M. A. Tamor, W. C. Vassell, K. R. Carduner, Atomic constraint in hydrogenated ‘‘diamond‐like’’ carbon Applied Physics Letters. ,vol. 58, pp. 592- 594 ,(1991) , 10.1063/1.104597
K. Yamamoto, Y. Koga, S. Fujiwara, F. Kokai, R.B. Heimann, Dependence of the sp3 bond fraction on the laser wavelength in thin carbon films prepared by pulsed laser deposition Applied Physics A. ,vol. 66, pp. 115- 117 ,(1998) , 10.1007/S003390050647
J. W. Zou, K. Schmidt, K. Reichelt, B. Dischler, The properties of a‐C:H films deposited by plasma decomposition of C2H2 Journal of Applied Physics. ,vol. 67, pp. 487- 494 ,(1990) , 10.1063/1.345230
N.M.J. Conway, A.C. Ferrari, A.J. Flewitt, J. Robertson, W.I. Milne, A. Tagliaferro, W. Beyer, Defect and disorder reduction by annealing in hydrogenated tetrahedral amorphous carbon Diamond and Related Materials. ,vol. 9, pp. 765- 770 ,(2000) , 10.1016/S0925-9635(99)00271-X
Wei Zhang, Akihiro Tanaka, Koichiro Wazumi, Yoshinori Koga, Mechanical and tribological properties of Ar incorporated diamond-like carbon films Thin Solid Films. ,vol. 416, pp. 145- 152 ,(2002) , 10.1016/S0040-6090(02)00611-9
H. Nakazawa, T. Kawabata, M. Kudo, M. Mashita, Structural changes of diamond-like carbon films due to atomic hydrogen exposure during annealing Applied Surface Science. ,vol. 253, pp. 4188- 4196 ,(2007) , 10.1016/J.APSUSC.2006.09.017
M Clin, M Benlahsen, A Zeinert, K Zellama, C Naud, Effect of annealing on the structural and electrical properties of d.c. multipolar plasma deposited a-C:H films Thin Solid Films. ,vol. 372, pp. 60- 69 ,(2000) , 10.1016/S0040-6090(00)01036-1
Kazuhiro Yamamoto, Yoshinori Koga, Shuzo Fujiwara, Fumio Kokai, The Fraction of Sp3 Bonding in Carbon Thin Film Prepared Using Pulsed Laser Deposition. Japanese Journal of Applied Physics. ,vol. 36, ,(1997) , 10.1143/JJAP.36.L1333