Nanobowl array fabrication based on nanoimprint lithography
作者： Man Zhang , Qiling Deng , Lifang Shi , Axiu Cao , Hui Pang
DOI: 10.1016/J.IJLEO.2015.10.024
关键词:
摘要: This paper presents a fabrication method of nanobowl array by combining polystyrenes spheres (PSs) self-assembly, nanoimprint lithography (NIL), and lift-off process. A self-assembly monolayer PSs on the quartz wafer is used as mold. After separating mold, residual onto resist can be lifted off in hydrofluoric acid solution achieved. The size modulated thickness resist. Using this method, different arrays with high-resolution nanogap nanoholes were fabricated, which has great potential to serve reaction container, catalyst surface enhanced Raman scattering substrate. (C) 2015 Elsevier GmbH. All rights reserved.
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