Optical properties of Al-doped ZnO nanorods and nanotubes arrays by nanoimprint lithography
作者： Yang Yi-Ting , Shih-Shou Lo
DOI: 10.1117/12.2306386
关键词: Nanotube 、 Transmission electron microscopy 、 Chemical engineering 、 Aqueous solution 、 Doping 、 Materials science 、 Nanoimprint lithography 、 Zinc 、 Nanorod 、 Hydrothermal circulation
摘要: The purpose of this study was researching the optical properties Al-doped zinc oxide (ZnO) nanorods and nanotubes arrays by nanoimprint lithography. First, substrate processed with lithography to form nanohole arrays. Based on we grown Al-dope ZnO which incorporated Al(NO 3 ) ·9H 2 O as Al source via hydrothermal method. were method because it’s a simple effective way for low temperature synthesis. structure affected PH value growing solution. Due aluminum nitrate, so added ammonia water control Until vertically oriented that row orderly. transformed nanotube chemical aqueous etching process well-controlled reaction time. Therefore, Aldoped obtained. Finally, characterized field emission scanning electron microscopy (FESEM), Transmission (TEM), Energy Dispersive Spectrometer (EDS) X-ray diffraction (XRD). FESEM TEM images showed morphologies dope orderly XRD EDS analysis element could be successfully doped into lattice.
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sci-hub.st 参考文章(23)
Jihye Lee, Sohee Cheon, Jun-Hyuk Choi, Dae-Geun Choi, Joo-Yun Jung, Sohee Jeon, Eung-sug Lee, Jun-Ho Jeong, Shape-controlled fabrication of nanopatterned samarium-doped cerium oxide thin films using ultraviolet nanoimprint lithography Thin Solid Films. ,vol. 636, pp. 552- 557 ,(2017) , 10.1016/J.TSF.2017.06.014
Po-Yuan Tseng, Chien-Hung Lin, Impacts of mold material and pattern size for ultrasonic nanoimprint lithography Microelectronic Engineering. ,vol. 98, pp. 112- 116 ,(2012) , 10.1016/J.MEE.2012.07.083
Ki-Yeon Yang, Kyung-Min Yoon, Kyung-Woo Choi, Heon Lee, The direct nano-patterning of ZnO using nanoimprint lithography with ZnO-sol and thermal annealing Microelectronic Engineering. ,vol. 86, pp. 2228- 2231 ,(2009) , 10.1016/J.MEE.2009.03.078
Panpan Shen, Yuzhen Tong, Dian Sheng, Xingyi Tang, Li-Hua Shao, Huiling Duan, Modulating the morphology of ZnO nanorod arrays on SiO x -mask-patterned GaN template Materials Letters. ,vol. 195, pp. 22- 25 ,(2017) , 10.1016/J.MATLET.2017.02.047
Joondong Kim, Hyunyub Kim, Hyeong-Ho Park, Chaehwan Jeong, Nano-imprint for near-zero reflected Si solar cells Current Applied Physics. ,vol. 17, pp. 103- 109 ,(2017) , 10.1016/J.CAP.2016.11.008
H.L. Chen, S.Y. Chuang, H.C. Cheng, C.H. Lin, T.C. Chu, Directly patterning metal films by nanoimprint lithography with low-temperature and low-pressure Microelectronic Engineering. ,vol. 83, pp. 893- 896 ,(2006) , 10.1016/J.MEE.2006.01.095
G.H. Jeong, J.K. Park, K.K. Lee, J.H. Jang, C.H. Lee, H.B. Kang, C.W. Yang, S.J. Suh, Fabrication of low-cost mold and nanoimprint lithography using polystyrene nanosphere Microelectronic Engineering. ,vol. 87, pp. 51- 55 ,(2010) , 10.1016/J.MEE.2009.05.022
Masanori Okada, Daisuke Yamashita, Noriyuki Unno, Jun Taniguchi, Defect analysis and lifetime evaluation of a release-coated nanoimprint mold Microelectronic Engineering. ,vol. 123, pp. 117- 120 ,(2014) , 10.1016/J.MEE.2014.06.009
Eran Avnon, Nir Yaacobi-Gross, Elina Ploshnik, Roy Shenhar, Nir Tessler, Low cost, nanometer scale nanoimprinting - Application to organic solar cells optimization Organic Electronics. ,vol. 12, pp. 1241- 1246 ,(2011) , 10.1016/J.ORGEL.2011.03.041
Man Zhang, Qiling Deng, Lifang Shi, Axiu Cao, Hui Pang, Song Hu, Nanobowl array fabrication based on nanoimprint lithography Optik. ,vol. 127, pp. 145- 147 ,(2016) , 10.1016/J.IJLEO.2015.10.024