Effect of film thickness on properties of aluminum doped zinc oxide thin films deposition on polymer substrate
作者： Nihan Akin , S. Sebnem Cetin , Mehmet Cakmak , Tofig Memmedli , Suleyman Ozcelik
DOI: 10.1007/S10854-013-1528-0
关键词:
摘要: A series of aluminum doped zinc oxide thin films with different thickness (25–150 nm) were deposited on indium tin coated polyethylene terephthalate substrates by radio frequency magnetron sputtering method at room temperature. The structural, optical and electrical properties the investigated X-ray Diffractometer, UV–Vis spectrometer Hall Effect Measurement System. All obtained polycrystalline a hexagonal structure preferred orientation along [002] direction c-axis perpendicular to substrate surface. energy band gap (Eg) values found be in range from 3.36 3.26 eV, their average transmissions about 75 % visible region. had excellent resistivities 2.78 × 10−5 2.03 10−4 Ω cm, carrier densities more than 3.35 1021 cm−3 mobilities between 5.77 11.13 cm2/V s.
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