The properties of Al doped ZnO thin films deposited on various substrate materials by RF magnetron sputtering

摘要: Transparent conductive Al-doped ZnO (AZO) thin films were deposited on various substrates including glass, polyimide film (PI) and stainless steel, using radio frequency magnetron sputtering method. The structural, electrical optical properties of AZO grown systematically investigated. We observe that substrate materials play important roles in crystallization resistivity but little transmittance. X-ray diffractometer study shows all obtained have wurtzite phase with highly c-axis preferred orientation, glass present the strongest (002) diffraction peaks. presence compression stress plays critical role determining crystalline structure films, which tends to stretch lattice constant c enlarge angle. Although finest reaches 12.52 × 10-4 Ωm, AFM manifests flexible substrates, especially bestrew similar inverted pyramid are suitable for window material electrode solar cells. average transmittance PI both around 85% visible light range (400–800 nm).