Deposition and Characterization of Ferroelectric Pb[(Mg1/3Nb2/3)xTi1-x]O3 Thin Films by RF Magnetron Sputtering
作者： Ming-Chrong Jiang , Tian-Jue Hong , Tai-Bor Wu
DOI: 10.1143/JJAP.33.6301
关键词:
摘要: Ferroelectric Pb [(Mg 1/3 Nb 2/3) x Ti 1-x] O 3 (PMNT) thin films with a well-developed perovskite structure were prepared on Si (100) and Pt/Ti/SiO 2/Si (100) substrates by rf magnetron …
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jsap.jp参考文章(2)
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