***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***Method for the removal of airborne molecular contaminants using water gas mixtures
作者： Jeffrey J. Spiegelman , Daniel Alvarez Jr.
DOI:
关键词:
摘要: The present invention discloses a method for the removal of number molecular contaminants from surfaces within device. A purge gas containing oxygen and/or water is introduced into interior device, contacting at least portion surfaces. contaminated produced by transferring contamination gas. removed device and process continued until contaminant concentration in below predetermined level.
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