Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure
作者： John Reece Roth
DOI:
关键词: Atmospheric air 、 Glow discharge 、 Surface cleaning 、 Glow discharge plasma 、 Atmosphere 、 Ion trapping 、 Chemistry 、 Plasma 、 Analytical chemistry
摘要: The surface of a workpiece is cleaned by generating steady-state one atmosphere glow discharge plasma above the workpiece. use atmosphere, uniform plasmas generated low frequency RF ion trapping mechanisms prefferred. used to effect cleaning may be formed in atmospheric air or other gases at about pressure, pressures below atmosphere.
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