Structural properties of barium strontium titanate films grown under different technological conditions
作者： A. V. Tumarkin , V. I. Al’myashev , S. V. Razumov , M. M. Gaidukov , A. G. Gagarin
DOI: 10.1134/S1063783415030348
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摘要: The structural properties of ferroelectric barium strontium titanate films with different compositions prepared under deposition conditions have been investigated. It has shown that the temperature directly affects phase and component films, crystal lattice parameters, crystallite sizes. At a approximately 600°C, impurity phases polytitanates are formed in addition to phase. An increase 880°C leads deficiency as compared sputtering target. providing stoichiometric transfer composition target into film estimated.
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