Apparatus for depositing a multilayer coating on discrete sheets

摘要: A tool for depositing multilayer coatings onto a substrate. The includes housing defining vacuum chamber connected to source, deposition stations each configured deposit layer of coating on the substrate, curing station, and contamination reduction device. At least one is an inorganic layer, while at other station organic layer. In configuration, substrate may travel back forth through as many times needed achieve desired number layers coating. another, include numerous housings adjacently spaced such that make single unidirectional pass. device be or more migration control chambers about stations, further cooling devices, chillers, reduce presence vaporous precursors. particularly well-suited flexible substrates, well encapsulating environmentally-sensitive devices placed