Interaction effects of temperature and stress on matched-mode gyroscope frequencies
作者： E. Tatar , C. Guo , T. Mukherjee , G. K. Fedder
DOI: 10.1109/TRANSDUCERS.2013.6627320
关键词:
摘要: We present our initial results toward understanding the interaction of temperature and stress on resonant frequencies a matched-mode SOI-MEMS gyroscope. also validate new electrostatic frequency tuning design for gyroscopes that works over large displacements. A gradient is formed gyroscope die by using on-chip silicon heaters, affecting frequencies. Simulation measurements under different conditions are compared. show orientation with respect to an asymmetric package plays important role in response environmental conditions.
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