Tuning of nonlinearities and quality factor in a mode-matched gyroscope

作者: Erdinc Tatar , Tamal Mukherjee , Gary K. Fedder

DOI: 10.1109/MEMSYS.2014.6765762

关键词: Quality (physics)InterconnectionResonatorGyroscopeMaterials scienceQ factorControl theoryNonlinear systemVibrating structure gyroscopeAcousticsProof mass

摘要: … for a MEMS gyroscope since it directly affects the thermal noise limit of the gyroscope. Matching the Q of … The gyroscope studied in this work is driven and sensed electrostatically. The …

参考文章(10)
B. Kim, C.M. Jha, T. White, R.N. Candler, M. Hopcroft, M. Agarwal, K.K. Park, R. Melamud, S. Chandorkar, T.W. Kenny, Temperature Dependence of Quality Factor in MEMS Resonators international conference on micro electro mechanical systems. pp. 590- 593 ,(2006) , 10.1109/MEMSYS.2006.1627868
Hee-Moon Jeong, Sung Kyu Ha, Dynamic analysis of a resonant comb-drive micro-actuator in linear and nonlinear regions Sensors and Actuators A-physical. ,vol. 125, pp. 59- 68 ,(2005) , 10.1016/J.SNA.2005.07.005
D. K. Agrawal, J. Woodhouse, A. A. Seshia, Modeling nonlinearities in MEMS oscillators IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control. ,vol. 60, pp. 1646- 1659 ,(2013) , 10.1109/TUFFC.2013.2747
Mrigank Sharma, Elie Hanna Sarraf, Rajashree Baskaran, Edmond Cretu, None, Parametric resonance: Amplification and damping in MEMS gyroscopes Sensors and Actuators A: Physical. ,vol. 177, pp. 79- 86 ,(2012) , 10.1016/J.SNA.2011.08.009
Amro M. Elshurafa, Kareem Khirallah, Hani H. Tawfik, Ahmed Emira, Ahmed K. S. Abdel Aziz, Sherif M. Sedky, Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 20, pp. 943- 958 ,(2011) , 10.1109/JMEMS.2011.2148162
E. Tatar, C. Guo, T. Mukherjee, G. K. Fedder, Interaction effects of temperature and stress on matched-mode gyroscope frequencies international conference on solid state sensors actuators and microsystems. pp. 2527- 2530 ,(2013) , 10.1109/TRANSDUCERS.2013.6627320
Bongsang Kim, Matthew A. Hopcroft, Rob N. Candler, Chandra Mohan Jha, Manu Agarwal, Renata Melamud, Saurabh A. Chandorkar, Gary Yama, Thomas W. Kenny, Temperature Dependence of Quality Factor in MEMS Resonators IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 17, pp. 755- 766 ,(2008) , 10.1109/JMEMS.2008.924253
Chihwan Jeong, Seonho Seok, Byeungleul Lee, Hyeonched Kim, Kukjin Chun, A study on resonant frequency and Q factor tunings for MEMS vibratory gyroscopes Journal of Micromechanics and Microengineering. ,vol. 14, pp. 1530- 1536 ,(2004) , 10.1088/0960-1317/14/11/014
Manu Agarwal, Kwan Park, Rob Candler, Bongsang Kim, Matthew Hopcroft, Saurabh Chandorkar, Chandra Jha, Renata Melamud, Thomas Kenny, Boris Murmann, Nonlinear Characterization of Electrostatic MEMS Resonators international frequency control symposium. pp. 209- 212 ,(2006) , 10.1109/FREQ.2006.275380
Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, Foucault pendulum on a chip: angle measuring silicon MEMS gyroscope international conference on micro electro mechanical systems. pp. 161- 164 ,(2011) , 10.1109/MEMSYS.2011.5734386