作者: Erdinc Tatar , Tamal Mukherjee , Gary K. Fedder
DOI: 10.1109/MEMSYS.2014.6765762
关键词: Quality (physics) 、 Interconnection 、 Resonator 、 Gyroscope 、 Materials science 、 Q factor 、 Control theory 、 Nonlinear system 、 Vibrating structure gyroscope 、 Acoustics 、 Proof mass
摘要: … for a MEMS gyroscope since it directly affects the thermal noise limit of the gyroscope. Matching the Q of … The gyroscope studied in this work is driven and sensed electrostatically. The …