Temperature Dependence of Quality Factor in MEMS Resonators
作者： B. Kim , C.M. Jha , T. White , R.N. Candler , M. Hopcroft
DOI: 10.1109/MEMSYS.2006.1627868
关键词:
摘要: The temperature dependence of the quality factor, Q, encapsulated MEMS resonators is analyzed in an effort to understand regimes where different energy loss mechanisms are dominant. effect two limiting for these resonators, air damping and thermo elastic dissipation, separately determine Q system over a range temperatures. can be designed have either strong weak on temperature, if effects dominant with well understood. Up 1% change factor per ° C was demonstrated, leading possibility using as absolute thermometer compensation resonators.
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