作者: Lynn Khine , Moorthi Palaniapan , Wai-Kin Wong
DOI: 10.1109/SENSOR.2007.4300665
关键词: Quality (physics) 、 Mode (statistics) 、 Materials science 、 Resonator 、 Electrical engineering 、 Q factor 、 Q value 、 Max Q 、 Vacuum pressure 、 Atomic physics 、 Square (algebra)
摘要: … Abstract: In this paper, we report a 6.3MHz Lamé-mode square resonator with fully differential drive and sense electronics, exhibiting quality factor, Q values exceeding 1 million in …