6Mhz Bulk-Mode Resonator with Q Values Exceeding One Million

作者: Lynn Khine , Moorthi Palaniapan , Wai-Kin Wong

DOI: 10.1109/SENSOR.2007.4300665

关键词: Quality (physics)Mode (statistics)Materials scienceResonatorElectrical engineeringQ factorQ valueMax QVacuum pressureAtomic physicsSquare (algebra)

摘要: … Abstract: In this paper, we report a 6.3MHz Lamé-mode square resonator with fully differential drive and sense electronics, exhibiting quality factor, Q values exceeding 1 million in …

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