Investigation of Ga2O3-Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System
作者： Shao-Yu Chu , Meng-Xian Shen , Tsung-Han Yeh , Chia-Hsun Chen , Ching-Ting Lee
DOI: 10.3390/S20216159
关键词:
摘要: In this work, Ga 2 O 3 films were deposited on sapphire substrates using a plasma-enhanced atomic layer deposition system with trimethylgallium precursor and oxygen (O 2 ) plasma. …
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