Crystal Orientation of YBa2Cu3O7-yThin Films Prepared by RF Sputtering

作者: Tadashi Arikawa , Hideo Itozaki , Keizo Harada , Kenjiro Higaki , Saburo Tanaka

DOI: 10.1143/JJAP.29.L2199

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摘要: The effect of growth temperature on the crystallinity and morphology YBa2Cu3O7-y thin films was investigated. Thin were grown MgO (100) single-crystal substrates by RF magnetron sputtering. Preferred orientations can be controlled adjusting substrate temperature, Ts; a-axis oriented deposited at 540°C

参考文章(1)
Masayuki Sagoi, Yoshiaki Terashima, Koh-ichi Kubo, Yoshihisa Mizutani, Tadao Miura, Jiro Yoshida, Koh-ichi Mizushima, Structural Features and Superconducting Properties of As-Grown Y–Ba–Cu–O Films Japanese Journal of Applied Physics. ,vol. 28, ,(1989) , 10.1143/JJAP.28.L444