ab-oriented YBa2Cu3O7 thin film grown on c-axis layer by radio frequency sputtering
作者： Sijia Wu , K.‐W. Ng , J. D. Robertson , R. J. Jacob
DOI: 10.1063/1.351969
关键词:
摘要: YBa2Cu3O7 films can be grown on different substrates by the off‐axis ac magnetron sputtering method. Films in ab orientation tend to grow at a lower substrate temperature than c‐axis films. However, as is lowered, all we have tested, except for SrTiO3, form amorphous phases that degrade quality of being made. In this manuscript it shown if thin layer film deposited first, then effectively reduces formation and improves significantly.
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