Tactile surface inspection during device fabrication or assembly

摘要: Processes for inspecting a surface during device fabrication include contacting the with tactile sensor. The sensor is an electroluminescent array or current electrode capacitive array. configured to convert local stress resulting from contact into light intensity and/or modulation in density. Both and density are linearly proportional stress. image provided by can then be captured focusing onto suitable detector provide topographical of surface. Current alternatively directly sensed via high resolution